Contents

1. Overview and Introduction 2. New Trends in Engineering and Science: Micro- and Nanoscale Systems 3. Fundamentals of MEMS Fabrication 4. Devising and Synthesis of MEMS AND NEMS 5. Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures 6. Nanosystems, Quantum Mechanics, and Mathematical Models 7. Control of Micro electro mechanical Systems 8. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS